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- 131066883 alternateName "Conference on Materials and Device Characterization in Micromachining 1998 Santa Clara, Calif".
- 131066883 alternateName "SPIE Conference on Materials and Device Characterization in Micromachining".
- 131066883 name "Conference on Materials and Device Characterization in Micromachining".
- 131066883 sameAs 5305654-1.
- 131066883 type Organization.
- 131066883 seeAlso skos:Concept.