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- 132198319 alternateName "IEEE Annual International Micro-Electro-Mechanical Systems Workshop".
- 132198319 alternateName "IEEE International Workshop on Micro-Electro-Mechanical Systems".
- 132198319 alternateName "International Micro-Electro-Mechanical Systems Workshop".
- 132198319 alternateName "International Workshop on Micro-Electro-Mechanical Systems 9 1996 San Diego, Calif".
- 132198319 alternateName "MEMS".
- 132198319 name "International Workshop on Micro-Electro-Mechanical Systems".
- 132198319 sameAs 5190099-3.
- 132198319 type Organization.
- 132198319 seeAlso skos:Concept.