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- 138136768 alternateName "Conference on Materials and Device Characterization in Micromachining 2 1999 Santa Clara, Calif".
- 138136768 alternateName "SPIE Conference on Materials and Device Characterization in Micromachining".
- 138136768 name "Conference on Materials and Device Characterization in Micromachining".
- 138136768 sameAs 6008402-9.
- 138136768 type Organization.
- 138136768 seeAlso skos:Concept.