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{ <http://viaf.org/viaf/140574092> ?p ?o. }
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140574092
alternateName
"
Symposium on the Deposition of Thin Films by Sputtering 1 1966 Rochester, NY
"
.
140574092
name
"
Symposium on the Deposition of Thin Films by Sputtering
"
.
140574092
sameAs
10177279-8
.
140574092
type
Organization
.
140574092
seeAlso
skos:Concept
.
