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- 141546334 alternateName "Electron Beam, X-Ray, and Ion Beam Submicrometer Lithographies for Manufacturing Conference 3 1993 San José, Calif".
- 141546334 alternateName "Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing Conference".
- 141546334 name "Electron Beam, X-Ray, and Ion Beam Submicrometer Lithographies for Manufacturing Conference".
- 141546334 sameAs 5140714-0.
- 141546334 type Organization.
- 141546334 seeAlso skos:Concept.