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- 143898018 alternateName "Conference on Advances in Resist Technology and Processing 10 1993 San Jose, Calif".
- 143898018 alternateName "SPIE Conference on Advances in Resist Technology and Processing".
- 143898018 name "Conference on Advances in Resist Technology and Processing".
- 143898018 sameAs 5141661-X.
- 143898018 type Organization.
- 143898018 seeAlso skos:Concept.