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- 144009857 alternateName "Conference on Materials and Device Characterization in Micromachining 2000 Santa Clara, Calif".
- 144009857 alternateName "SPIE Conference on Materials and Device Characterization in Micromachining".
- 144009857 name "Conference on Materials and Device Characterization in Micromachining".
- 144009857 sameAs 6023205-5.
- 144009857 type Organization.
- 144009857 seeAlso skos:Concept.