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- 145177556 alternateName "International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators 1 1998 Santa Clara, Calif".
- 145177556 alternateName "MSM".
- 145177556 name "International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators".
- 145177556 sameAs 6016230-2.
- 145177556 type Organization.
- 145177556 seeAlso skos:Concept.