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- 146097503 alternateName "International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components 2 1991 Berlin".
- 146097503 alternateName "International Conference on Microsystem Technologies".
- 146097503 alternateName "International Meeting on Microsystem Technologies".
- 146097503 name "International Conference on Micro-Electro-, -Opto-, -Mechanic Systems and Components".
- 146097503 sameAs 2119552-3.
- 146097503 type Organization.
- 146097503 seeAlso skos:Concept.