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- 146415814 alternateName "International Symposium on Microelectronics, MEMS and Nanotechnology 2005 Brisbane".
- 146415814 alternateName "Microelectronics, MEMS and Nanotechnology Symposium".
- 146415814 alternateName "SPIE International Symposium on Microelectronics, MEMS and Nanotechnology".
- 146415814 alternateName "SPIE's Microelectronics, MEMS and Nanotechnology Symposium".
- 146415814 name "International Symposium on Microelectronics, MEMS and Nanotechnology".
- 146415814 sameAs 6053838-7.
- 146415814 type Organization.
- 146415814 seeAlso skos:Concept.