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- 149979130 alternateName "International Symposium on CMP in Integrated Circuit Device Manufacturing".
- 149979130 alternateName "International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing 6 2003 Orlando, Fla".
- 149979130 name "International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing".
- 149979130 sameAs 6083230-7.
- 149979130 type Organization.
- 149979130 seeAlso skos:Concept.