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- 154653703 alternateName "Micromachining and Microfabrications Conference for MOEMS and Miniaturized Systems 3 2003 San José, Calif".
- 154653703 alternateName "SPIE's Micromachining and Microfabrications Conference for MOEMS and Miniaturized Systems".
- 154653703 name "Micromachining and Microfabrications Conference for MOEMS and Miniaturized Systems".
- 154653703 sameAs 6086028-5.
- 154653703 type Organization.
- 154653703 seeAlso skos:Concept.