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- 263737261 alternateName "Conference on Smart Electronics and MEMS 1999 Newport Beach, Calif".
- 263737261 alternateName "SPIE Conference on Smart Electronics and MEMS".
- 263737261 name "Conference on Smart Electronics and MEMS".
- 263737261 sameAs 5349382-5.
- 263737261 type Organization.
- 263737261 seeAlso skos:Concept.