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- 313329447 translationOfWork 314752993.
- 313329447 translator \u5F35\u9F0E\u5F35.
- 313329447 translator \u5F35\u9F0E\u5F35_and_\u7F85\u6B63\u5FE0.
- 313329447 alternateName "Introduction to semiconductor manufacturing technology".
- 313329447 author 21643341.
- 313329447 creator 21643341.
- 313329447 dateCreated "2001".
- 313329447 inLanguage "zh".
- 313329447 name "Ban dao ti zhi cheng ji shu dao lun".
- 313329447 name "半導體製程技術導論".
- 313329447 workExample 271096198.
- 313329447 type CreativeWork.