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- skos:Concept type Concept.
- skos:Concept altLabel "Methods and Materials in Microelectronic Technology, International Symposium on".
- skos:Concept altLabel "Symposium on Methods and Materials in Microelectronic Technology, International".
- skos:Concept exactMatch n84028878.
- skos:Concept inScheme LC.
- skos:Concept prefLabel "International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Germany)".
- skos:Concept focus 138421123.